無塵室潔凈度等級標準

潔凈度

粒徑(um)

0.1

0.2

0.3

0.5

5.0

1

35.0

7.50

3.00

1.00

NA

10

350

75.0

30.0

10.0

NA

100

NA

750

300

100

NA

1000

NA

NA

NA

1000

7.0

10000

NA

NA

NA

10000

70.3

100000

NA

NA

NA

100000

700

潔凈度

塵埃允許數/平方米

微生物大允許數

≥0.5um

≥5um

浮游菌個/立方米

沉降菌個/皿.30min

100

3500

0

5

1

10000

350,000

2,000

100

3

100000

3,500,000

20,000

500

10

300000

10,500,000

61,800

NA

15

個/M³≥0.5um

ISO
14644-1(1999)

US
209E(1992)

US
209D(1988)

EEC
GGMP(1989)

FRANCE
AFNOR(1981)

GERMANY
VDI2083(1990)

JAPAN
JAOA(1989)

1

-

-

-

-

-

-

-

3.5

2

-

-

-

-

0

2

10.0

-

M1

-

-

-

-

-

35.3

3

M1.5

1

-

-

1

3

100

-

M2

-

-

-

-

-

353

4

M2.5

10

-

-

2

4

1,000

-

M3

-

-

-

-

-

3,530

5

M3.5

100

A+B

4,000

3

5

10,000

-

M4

-

-

-

-

-

35,300

6

M4.5

1,000

1,000

-

4

6

100,000

-

M5

-

-

-

-

-

353,000

7

M5.5

10,000

C

400,000

5

7

1,000,000

-

M6

-

-

-

-

-

3,530,000

8

M6.5

100,000

D

4,000,000

6

8

10,000,000

-

M7

-

-

-

-

-

空氣潔凈度等級(N)

大于或等于表中粒徑的大濃度限值(pc/m³)

0.1um

0.2um

0.3um

0.5um

1um

5um

1

10

2

2

100

24

10

4

3

1000

237

102

35

8

4

10000

2370

1020

352

83

5

100000

23700

10200

3520

832

29

6

1000000

237000

102000

35200

8320

293

7

352000

83200

2930

8

3520000

832000

29300

9

35200000

8320000

293000